山东盛太锆业资源有限公司

Main product

Yttrium oxide spray powder

Yttria spray powder
Density: ≥ 5.01 g/m³

Particle size range: 0.4 – 45 micrometers

Flowability: ≥ 30 seconds/50 grams

Yttrium content: ≥ 99.999% / 99.99%

Yttria-based spray powder CAS: 1314-36-9

The HS customs code for yttria-based spray powder: 2846901100

Yttria-based spray powder is a high-purity ceramic powder specially designed for thermal spraying processes. Its core application is to prepare special protective coatings with high corrosion resistance, ultra-high temperature stability, and high cleanliness for various high-end equipment. Currently, it has become an indispensable core spraying material in semiconductor, new energy, aerospace and other fields.

?? Semiconductor manufacturing field
This is the most core and necessary application scenario of yttria-based spray powder:

It is used to prepare protective coatings on the surfaces of key components such as the cavities, inner linings, spray nozzles, focusing rings, and electrostatic clamps of equipment used in etching machines, PVD/PECVD, ALD, etc.
The coating can resist long-term erosion by fluorine-based and chlorine-based strong corrosive plasmas, and its stability far exceeds that of alumina and ordinary zirconia, avoiding the erosion of equipment components and the generation of particle contamination on wafers, significantly improving the yield of chip manufacturing.
The 4N (99.99%) pure powder is suitable for large-scale cavity spraying of mature 28nm and above processes, while the 5N (99.999%) ultra-pure powder is exclusively for precise small parts in advanced 7nm and below processes, eliminating the release of trace impurities that affect process accuracy.
?? New energy manufacturing field
It is suitable for harsh high-temperature production conditions in lithium batteries, hydrogen energy, etc.:

The 4N high-purity yttria coating is sprayed on the positive electrode materials of batteries for sintering crucibles, which can resist lithium salt corrosion and repeated cold-hot cycle impacts, remaining unchanged in color, not cracking, and not shedding powder under long-term high-temperature use, significantly extending the service life of crucibles.
The 5N ultra-pure powder is used in solid-state battery sintering, automotive-grade semiconductor production, etc., from the source to avoid impurities from mixing into batteries or chip products, ensuring the process accuracy of high-end manufacturing.
After spraying this coating on high-temperature components and precision production tools for hydrogen energy, the thermal shock resistance and corrosion resistance are significantly improved, suitable for continuous production operation rhythms.
✈️ Aerospace and high-end industrial fields
It provides special protection for extreme conditions:

Used as anti-ablation, insulation, and insulation coatings for aerospace engines and hypersonic aircraft, it protects the metal substrate from melting, oxidation, and no phase change or cracking under extreme high-temperature gas flow impacts above 1800℃.
It is used on insulation components in high-temperature furnaces, contact parts of molten metals, and surface of glass forming molds to resist erosion by molten metals and resist high-temperature adhesion, significantly extending the service life of furnace components and molds.
As a stabilizer raw material for zirconia ceramics, when precisely mixed, the yttria-stabilized zirconia (YSZ) thermal spraying powder prepared is a classic thermal barrier coating material for high-end heat-end components of aircraft engines and gas turbine blades, achieving efficient heat insulation protection.

Technical parameter